The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2012
Filed:
Dec. 22, 2008
Nathan Stafford, Wilmington, DE (US);
Christian Dussarrat, Wilmington, DE (US);
Olivier Letessier, San Jose, CA (US);
Ravi K. Laxman, San Jose, CA (US);
Nathan Stafford, Wilmington, DE (US);
Christian Dussarrat, Wilmington, DE (US);
Olivier Letessier, San Jose, CA (US);
Ravi K. Laxman, San Jose, CA (US);
Air Liquide Electronics U.S. LP, Dallas, TX (US);
American Air Liquide, Inc., Fremont, CA (US);
Abstract
Methods of storing a precursor which decreases the precursor decomposition rate. A vessel is provided, where the vessel has an outer surface made of a first material, and an inner surface made of a second material. The first and second materials are different. A tantalum containing precursor is placed inside the vessel, and the vessel is heated to a temperature between 60° C. and 150° C. At least part of the precursor is withdrawn from the vessel.