The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2011
Filed:
Aug. 15, 2008
Gen You, Nirasaki, JP;
Makoto Muramatsu, Nirasaki, JP;
Hiroyuki Fujii, Koshi, JP;
Shouichi Terada, Koshi, JP;
Takanori Nishi, Koshi, JP;
Gen You, Nirasaki, JP;
Makoto Muramatsu, Nirasaki, JP;
Hiroyuki Fujii, Koshi, JP;
Shouichi Terada, Koshi, JP;
Takanori Nishi, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
In the present invention, a coating solution containing polysilazane is applied to a substrate to form a coating film. Thereafter, an ultraviolet ray is applied to the coating film formed on the substrate to cut a molecular bond of polysilazane in the coating film. Then, the coating film in which the molecular bond of polysilazane has been cut is oxidized while the coating film is being heated. Then, the oxidized coating film is baked at a baking temperature equal to or higher than a heating temperature when the coating film is oxidized.