The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2011
Filed:
Nov. 13, 2008
Kazuhiko Shimanuki, Yamagata, JP;
Daisuke Hayashi, Tokyo, JP;
Kazuhiko Shimanuki, Yamagata, JP;
Daisuke Hayashi, Tokyo, JP;
Covalent Materials Corporation, Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A planar heaterin which a power supply terminal unitwhich supplies an electric power is arranged on a central portion on a lower surface of a silica glass plate-like member. The power supply terminal unit includes small-diameter silica glass tubesand, which contain a connection line which supplies an electric power to a carbon heat generator and a large-diameter silica glass tubewhich contains the small-diameter silica glass tubesand. A flange portionis formed on a lower end of the large-diameter silica glass tube, and a bent portionhaving different diameters is formed between an upper end of the large-diameter silica glass and the flange portion, and the first heat shielding platesandconfigured by metal plates or opaque silica glass plates are contained in the large-diameter silica glass tube below the bent portion.