The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2011
Filed:
Jan. 20, 2011
Applicants:
Maurits Van Der Schaar, Veldhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Everhardus Cornelis Mos, Best, NL;
Stefan Carolus Jacobus Antonius Keij, Breda, NL;
Inventors:
Maurits Van Der Schaar, Veldhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Everhardus Cornelis Mos, Best, NL;
Stefan Carolus Jacobus Antonius Keij, Breda, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A substrate includes an overlay target. The overlay target can include two superposed layers. Each of the two superposed layers includes two gratings with a different pitch from each other.