The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2011
Filed:
Jun. 04, 2007
Futoshi Iwata, Shizuoka, JP;
Masatoshi Yasutake, Chiba, JP;
Takuya Nakaue, Chiba, JP;
Syuichi Kikuchi, Chiba, JP;
Osamu Takaoka, Chiba, JP;
Futoshi Iwata, Shizuoka, JP;
Masatoshi Yasutake, Chiba, JP;
Takuya Nakaue, Chiba, JP;
Syuichi Kikuchi, Chiba, JP;
Osamu Takaoka, Chiba, JP;
National University Corporation Shizuoka University, Shizuoka, JP;
SII Nano Technology Inc., Chiba, JP;
Abstract
There is a micro-machining apparatus for removing the micro-machining dust generated at the time of machining while a workpiece M is machined within a liquid W using a probe tip. The apparatus includes a stage on which the workpiece is to be placed; a probe having the probe tip, a machining device having a moving means that moves the stage and the probe relative to each other to machine the workpiece by the probe tip, and a micro-machining dust removing device having a first electrode and a second electrode that are arranged in the liquid so as to sandwich the probe tip therebetween, and a voltage application means that applies a voltage to between both the electrodes to move the micro-machining dust in the liquid.