The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2011
Filed:
Oct. 20, 2006
Herbert Buschbeck, Vienna, AT;
Elmar Platzgummer, Vienna, AT;
Gerhard Stengl, Wernberg, AT;
Herbert Vonach, Klosterneuburg, AT;
Herbert Buschbeck, Vienna, AT;
Elmar Platzgummer, Vienna, AT;
Gerhard Stengl, Wernberg, AT;
Herbert Vonach, Klosterneuburg, AT;
Carl Zeiss SMS GmbH, Jena, DE;
Abstract
A charged particle system comprises a particle source for generating a beam of charged particles and a particle-optical projection system. The particle-optical projection system comprises a focusing first magnetic lens () comprising an outer pole piece () having a radial inner end ('), and an inner pole piece () having a lowermost end () disposed closest to the radial inner end of the outer pole piece, a gap being formed by those; a focusing electrostatic lens () having at least a first electrode () and a second electrode () disposed in a region of the gap; and a controller (C) configured to control a focusing power of the first electrostatic lens based on a signal indicative of a distance of a surface of a substrate from a portion of the first magnetic lens disposed closest to the substrate.