The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2011
Filed:
May. 14, 2008
Applicants:
Shigeru Kasai, Minato-ku, JP;
Tomohiro Suzuki, Nirasaki, JP;
Inventors:
Shigeru Kasai, Minato-ku, JP;
Tomohiro Suzuki, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
F26B 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A heating apparatus for heating a target object W is provided with a plurality of heating light sources, including LED elements for applying heating light having a wavelength within a range from 360 to 520 nm to the object. Thus, a temperature of only the shallow surface of the object, such as a semiconductor wafer, is increased/reduced at a high speed in uniform temperature distribution, irrespective of the film type.
Published as:
WO2007058068A1; JP2007141896A; CN101091236A; KR20080058488A; US2008226272A1; CN101091236B; US8041197B2; KR101089929B1; JP4940635B2;