The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2011
Filed:
Nov. 24, 2008
Wilhelmus Johannes Maria DE Laat, Heeswijk-Dinther, NL;
Cheng-qun Gui, Best, NL;
Peter Theodorus Maria Giesen, Geldrop, NL;
Paulus Wilhelmus Leonardus Van Dijk, Tilburg, NL;
Erwin Rinaldo Meinders, Veldhoven, NL;
Maria Peter, Eindhoven, NL;
Wilhelmus Johannes Maria De Laat, Heeswijk-Dinther, NL;
Cheng-Qun Gui, Best, NL;
Peter Theodorus Maria Giesen, Geldrop, NL;
Paulus Wilhelmus Leonardus Van Dijk, Tilburg, NL;
Erwin Rinaldo Meinders, Veldhoven, NL;
Maria Peter, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A carrier substrate is provided with a layer of PDMS and curing agent on one side of the carrier substrate. The PDMS and curing agent can be arranged to receive and adhere to a lithographic substrate. The carrier substrate can be dimensioned such that the combined carrier substrate and lithographic substrate may be handled by a conventional lithographic apparatus.