The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2011
Filed:
Jun. 20, 2007
Joong Whan Lee, Daejeon, KR;
Young June Ko, Daejeon, KR;
Young Sun Park, Chungcheongnam-do, KR;
Yoon Jong Park, Gyeonggi-do, KR;
Chi Woon Jeong, Seoul, KR;
Sang Heon YE, Busan, KR;
Yong Jai Cho, Daejeon, KR;
Hyun MO Cho, Daejeon, KR;
Won Chegal, Daejeon, KR;
Joong Whan Lee, Daejeon, KR;
Young June Ko, Daejeon, KR;
Young Sun Park, Chungcheongnam-do, KR;
Yoon Jong Park, Gyeonggi-do, KR;
Chi Woon Jeong, Seoul, KR;
Sang Heon Ye, Busan, KR;
Yong Jai Cho, Daejeon, KR;
Hyun Mo Cho, Daejeon, KR;
Won Chegal, Daejeon, KR;
Korea Research Institute of Standards and Science, Daejeon, KR;
K-MAC, Daejeon, KR;
Abstract
The present invention relates to an ellipsometer, and more particularly, to an ellipsometer to find out the optical properties of the sample by analyzing the variation of the polarization of a light which has specific polarisation then reflected on a surface of the sample.