The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2011
Filed:
May. 08, 2007
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Emiel Jozef Melanie Eussen, Eindhoven, NL;
Stefan Gertrud Marie Hendriks, Waalre, NL;
Erik Roelof Loopstra, Heeze, NL;
Jacob Willem Vink, Eindhoven, NL;
Ruud Antonius Catharina Maria Beerens, Roggel, NL;
Lodewijk Alexander Schijvenaars, Zevenbergschenhoek, NL;
Tom Van Zutphen, Eindhoven, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Emiel Jozef Melanie Eussen, Eindhoven, NL;
Stefan Gertrud Marie Hendriks, Waalre, NL;
Erik Roelof Loopstra, Heeze, NL;
Jacob Willem Vink, Eindhoven, NL;
Ruud Antonius Catharina Maria Beerens, Roggel, NL;
Lodewijk Alexander Schijvenaars, Zevenbergschenhoek, NL;
Tom Van Zutphen, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method for calibrating an auxiliary sensor system is provided. The auxiliary sensor system measures a position of a grating relative to a reference, the grating forming part of an encoder measurement system. The encoder measurement system is adapted to measure a position of a substrate table of a lithographic apparatus and further comprises a sensor mounted to the substrate table. The method comprises exciting the grating to make a movement in at least one measurement direction of the auxiliary sensor system, obtaining an auxiliary sensor system output signal from the sensor system during the movement, and adjusting a parameter of the auxiliary sensor system based on the output signal obtained during the movement to thereby calibrate the auxiliary sensor system.