The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2011
Filed:
Dec. 01, 2005
Matthias Kuss, Sinningen, DE;
Damian Fiolka, Oberkochen, DE;
Gerd Reisinger, Oberkochen, DE;
Manfred Maul, Aalen, DE;
Vladimir Davydenko, Oberkochen, DE;
Matthias Kuss, Sinningen, DE;
Damian Fiolka, Oberkochen, DE;
Gerd Reisinger, Oberkochen, DE;
Manfred Maul, Aalen, DE;
Vladimir Davydenko, Oberkochen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A beam delivery system of a projection exposure system comprises a laser generating a beam of laser light from a plurality of longitudinal laser modes in a cavity, wherein light generated by a single longitudinal laser mode has an average line width λ, wherein the laser light of the beam has, at each of respective lateral positions of the beam, a second line width λcorresponding to lateral laser modes, and wherein the laser light of the beam has, when averaged over a whole cross section thereof, a line width λcorresponding to plural lateral laser modes, and wherein λ<λ<λ, and wherein an optical delay apparatus disposed in the beam provides an optical path difference Δl, wherein wherein λis an average wavelength of the light of the first beam of laser light, and Δλrepresents the second line width.