The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2011
Filed:
Jul. 05, 2007
Sunao Muraoka, Nirasaki, JP;
Hideki Nagaoka, Nirasaki, JP;
Masakazu Ban, Nirasaki, JP;
Cai Zhong Tian, Amagasaki, JP;
Sunao Muraoka, Nirasaki, JP;
Hideki Nagaoka, Nirasaki, JP;
Masakazu Ban, Nirasaki, JP;
Cai Zhong Tian, Amagasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A gate valve includes a plate-shaped valve element which is rectangular-shaped to suit the shape of an opening of a processing chamber and has a size larger than the opening. A hermetically sealing member to perform hermetic sealing by abutting on and being pressed against an outer side of the processing chamber is provided in the valve element. A microwave reflecting mechanism which is formed in a groove shape so as to surround a periphery of the hermetically sealing member is provided at an outer peripheral portion of the hermetically sealing member.