The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2011
Filed:
Sep. 18, 2007
Wei-su Chen, Hsinchu, TW;
Yi-chan Chen, Yunlin County, TW;
Hong-hui Hsu, Changhua County, TW;
Chien-min Lee, Kaohsiung, TW;
Der-sheng Chao, Taichung County, TW;
Chih Wei Chen, Miaoli County, TW;
Ming-jinn Tsai, Hsinchu, TW;
Wei-Su Chen, Hsinchu, TW;
Yi-Chan Chen, Yunlin County, TW;
Hong-Hui Hsu, Changhua County, TW;
Chien-Min Lee, Kaohsiung, TW;
Der-Sheng Chao, Taichung County, TW;
Chih Wei Chen, Miaoli County, TW;
Ming-Jinn Tsai, Hsinchu, TW;
ProMOS Technologies Inc., Hsinchu, TW;
Nanya Technology Corporation, Taoyuan, TW;
Winbond Electronics Corp., Taichung County, TW;
Abstract
A phase change memory device is provided. The phase change memory device comprises a substrate. An electrode layer is on the substrate. A phase change memory structure is on the electrode layer and electrically connected to the electrode layer, wherein the phase change memory structure comprises a cup-shaped heating electrode on the electrode layer. An insulating layer is on the cup-shaped heating electrode along a first direction covering a portion of the cup-shaped heating electrode. An electrode structure is on the cup-shaped heating electrode along a second direction covering a portion of the insulating layer and the cup-shaped heating electrode. A pair of double spacers is on a pair of sidewalls of the electrode structure covering a portion of the cup-shaped heating electrode, wherein the double spacer comprises a phase change material spacer and an insulating material spacer on a sidewall of the phase change material spacer.