The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7973413 B1

PDF
Full Text
Expired
Date of Patent:
Jul. 05, 2011

Filed:

Aug. 24, 2007
Applicants:

Chen-cheng Kuo, Chu-Pei, TW;

Chen Chen-shien, Zhubei, TW;

Kai-ming Ching, Jhudong Township, Hsinchu County, TW;

Chih-hua Chen, Taipei, TW;

Inventors:

Chen-Cheng Kuo, Chu-Pei, TW;

Chen Chen-Shien, Zhubei, TW;

Kai-Ming Ching, Jhudong Township, Hsinchu County, TW;

Chih-Hua Chen, Taipei, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/52 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor device including a substrate having a front surface and a back surface is provided. A plurality of interconnect layers are formed on the front surface and have a first surface opposite the front surface of the substrate. A tapered profile via extends from the first surface of the plurality of interconnect layers to the back surface of the substrate. In one embodiment, a insulating layer is formed on the substrate and includes an opening, and wherein the opening includes conductive material providing contact to the tapered profile via.


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