The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2011
Filed:
Oct. 20, 2008
Yuusuke Tanba, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Kaname Takahashi, Hitachinaka, JP;
Shunya Watanabe, Hitachinaka, JP;
Mine Nakagawa, Hitachinaka, JP;
Atsushi Muto, Hitachinaka, JP;
Akinari Morikawa, Hitachinaka, JP;
Yuusuke Tanba, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Kaname Takahashi, Hitachinaka, JP;
Shunya Watanabe, Hitachinaka, JP;
Mine Nakagawa, Hitachinaka, JP;
Atsushi Muto, Hitachinaka, JP;
Akinari Morikawa, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.