The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2011
Filed:
Oct. 30, 2006
Elmira Ryabova, Mountain View, CA (US);
Richard Lewington, Hayward, CA (US);
Madhavi R. Chandrachood, Sunnyvale, CA (US);
Amitabh Sabharwal, San Jose, CA (US);
Darin Bivens, San Mateo, CA (US);
Elmira Ryabova, Mountain View, CA (US);
Richard Lewington, Hayward, CA (US);
Madhavi R. Chandrachood, Sunnyvale, CA (US);
Amitabh Sabharwal, San Jose, CA (US);
Darin Bivens, San Mateo, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method of fabricating yttria parts is provided herein. In one embodiment, the method includes sintering a yttria sample, machining the sintered sample to form a part, and annealing the part in a three-stage process that includes heating the part at a predetermined heating rate, maintaining the part at a constant annealing temperature, and cooling the part at a predetermined cooling rate.