The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2011
Filed:
Nov. 23, 2007
Taro Yamamoto, Koshi, JP;
Yasushi Takiguchi, Koshi, JP;
Akihiro Fujimoto, Koshi, JP;
Hideharu Kyouda, Koshi, JP;
Junichi Kitano, Koshi, JP;
Osamu Miyahara, Koshi, JP;
Kenji Tsutsumi, Koshi, JP;
Taro Yamamoto, Koshi, JP;
Yasushi Takiguchi, Koshi, JP;
Akihiro Fujimoto, Koshi, JP;
Hideharu Kyouda, Koshi, JP;
Junichi Kitano, Koshi, JP;
Osamu Miyahara, Koshi, JP;
Kenji Tsutsumi, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A coating film forming apparatus includes a process section including one or more coating units and one or more thermally processing units; a pre-coating cleaning unit configured to perform cleaning on a back surface and an edge portion of a substrate; and a pre-coating check unit configured to check a state of a back surface and an edge portion of the substrate. A control section is configured to realize a sequence of cleaning the substrate by the pre-coating cleaning unit, checking the substrate by the pre-coating check unit, making a judgment based on a check result thus obtained of whether or not a state of particles on a back surface and an edge portion of the substrate is within an acceptable range, and permitting transfer of the substrate into the process section where the state of particles is within the acceptable range.