The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2011
Filed:
Nov. 18, 2005
Sven Antoin Johan Hol, Yokohama, JP;
Angelo Cesar Peter DE Klerk, Etten-Leur, NL;
Erik Roelof Loopstra, Heeze, NL;
Fransicus Mathijs Jacobs, Asten, NL;
Mark Scholten, Buchten, NL;
Sven Antoin Johan Hol, Yokohama, JP;
Angelo Cesar Peter De Klerk, Etten-Leur, NL;
Erik Roelof Loopstra, Heeze, NL;
Fransicus Mathijs Jacobs, Asten, NL;
Mark Scholten, Buchten, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A cooling apparatus is described that has a first cooling structure, in thermal contact with a heat source having a temperature greater than a cool structure, including a channel through which a cooling fluid is passed, an isolator between the heat source and the cool structure, the isolator in thermal contact with the first cooling structure and including a material of low thermal conductivity, and a second cooling structure between the isolator and the cool structure, the second cooling structure including a channel through which cooling fluid is passed.