The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2011
Filed:
Nov. 08, 2007
Applicants:
Tadahiro Ohmi, Miyagi, JP;
Seiji Yasuda, Miyagi, JP;
Atsutoshi Inokuchi, Yamanashi, JP;
Takaaki Matsuoka, Miyagi, JP;
Kohei Kawamura, Yamanashi, JP;
Inventors:
Tadahiro Ohmi, Miyagi, JP;
Seiji Yasuda, Miyagi, JP;
Atsutoshi Inokuchi, Yamanashi, JP;
Takaaki Matsuoka, Miyagi, JP;
Kohei Kawamura, Yamanashi, JP;
Assignees:
National Iniversity Corporation Tohoku University, Miyagi, JP;
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/58 (2006.01);
U.S. Cl.
CPC ...
Abstract
A wiring structure of a semiconductor device or the like includes an interlayer insulating film having a fluorocarbon film formed on an underlayer, and a conductor buried in the interlayer insulating film. The fluorocarbon film contains nitrogen and is low in dielectric constant, excellent in reproducibility and stable.