The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2011
Filed:
Jun. 26, 2008
Ali Shajii, Canton, MA (US);
Xing Chen, Lexington, MA (US);
Andrew Cowe, Andover, MA (US);
David Burtner, Belmont, MA (US);
William Robert Entley, Wakefield, MA (US);
Shouqian Shao, Boston, MA (US);
Ali Shajii, Canton, MA (US);
Xing Chen, Lexington, MA (US);
Andrew Cowe, Andover, MA (US);
David Burtner, Belmont, MA (US);
William Robert Entley, Wakefield, MA (US);
ShouQian Shao, Boston, MA (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel formed in the body structure and in fluid communication with the body structure inlet and the body structure outlet. The gas channel can define a path through the body structure that causes particles in a gas passing from a first portion of the channel to strike a wall that defines a second portion of the gas channel at an angle relative to a surface of the wall. A coolant member can be in thermal communication with the gas channel.