The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2011
Filed:
Jun. 03, 2009
Fabio A. Faccini, San Jose, CA (US);
Torsten R. Kaack, Los Altos, CA (US);
Jiyou Fu, Sunnyvale, CA (US);
Zhiming Jiang, Pleasanton, CA (US);
Fabio A. Faccini, San Jose, CA (US);
Torsten R. Kaack, Los Altos, CA (US);
Jiyou Fu, Sunnyvale, CA (US);
Zhiming Jiang, Pleasanton, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A method of performing an investigation of a substrate, by measuring a reflectivity of the substrate, comparing the reflectivity of the substrate to an anticipated reflectivity value, selectively subjecting the substrate to a laser beam for a predetermined duration and at a predetermined energy only when the reflectivity of the substrate is within a specified tolerance of the anticipated reflectivity value, selectively signaling a fault condition when the reflectivity of the substrate is not within the specified tolerance of the anticipated reflectivity value, and selectively performing the investigation of the substrate only when the reflectivity of the substrate is within the specified tolerance of the anticipated reflectivity value.