The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2011
Filed:
Oct. 05, 2004
Matthew Lipson, Stamford, CT (US);
Marcel Mathijs Theodore Marie Dierichs, Venlo, NL;
Sjoerd Nicolaas Lambertus Donders, 's-Hertogenbosch, NL;
Johannes Catharinus Hubertus Mulkens, Waalre, NL;
Bob Streefkerk, Tilburg, NL;
Ronald Wilklow, Fairfield, CT (US);
Roel DE Jonge, Veldoven, NL;
Matthew Lipson, Stamford, CT (US);
Marcel Mathijs Theodore Marie Dierichs, Venlo, NL;
Sjoerd Nicolaas Lambertus Donders, 's-Hertogenbosch, NL;
Johannes Catharinus Hubertus Mulkens, Waalre, NL;
Bob Streefkerk, Tilburg, NL;
Ronald Wilklow, Fairfield, CT (US);
Roel De Jonge, Veldoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
ASML Holding N.V., Veldhoven, NL;
Abstract
A lithographic apparatus is provided in which exposure is carried out by projecting through an aqueous solution of alkali metal halide(s), the solution being in contact with the substrate to be exposed.