The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2011
Filed:
Jan. 31, 2007
Hisashi Nakagawa, Tsukuba, JP;
Tatsuya Yamanaka, Santa Clara, CA (US);
Masahiro Akiyama, Auderghem, BE;
Terukazu Kokubo, Tsukuba, JP;
Youhei Nobe, Tsuchiura, JP;
Hisashi Nakagawa, Tsukuba, JP;
Tatsuya Yamanaka, Santa Clara, CA (US);
Masahiro Akiyama, Auderghem, BE;
Terukazu Kokubo, Tsukuba, JP;
Youhei Nobe, Tsuchiura, JP;
JSR Corporation, Tokyo, JP;
Abstract
An insulating-film-forming composition for a semiconductor device comprising an organic silica sol with a carbon atom content of 11 to 17 atom % and an organic solvent is disclosed. The organic silica sol comprises a hydrolysis-condensation product P1 and a hydrolysis-condensation product P2. The hydrolysis-condensation product P1 is obtained by hydrolyzing and condensing (A) a silane monomer comprising a hydrolyzable group and (B) a polycarbosilane comprising a hydrolyzable group in the presence of (C) a basic catalyst, and the hydrolysis-condensation product P2 is obtained by hydrolyzing and condensing (D) a silane monomer comprising a hydrolyzable group.