The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2011
Filed:
Dec. 04, 2008
Yasunari Sohda, Kawasaki, JP;
Shoji Hotta, Delmar, NY (US);
Shinji Okazaki, Saitama, JP;
Muneyuki Fukuda, Kokubunji, JP;
Yasunari Sohda, Kawasaki, JP;
Shoji Hotta, Delmar, NY (US);
Shinji Okazaki, Saitama, JP;
Muneyuki Fukuda, Kokubunji, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
The present invention provides an electron beam measurement technique for measuring the shapes or sizes of portions of patterns on a sample, or detecting a defect or the like. An electron beam measurement apparatus has a unit for irradiating the patterns delineated on a substrate by a multi-exposure method, and classifying the patterns in an acquired image into multiple groups according to an exposure history record. The exposure history record is obtained based on brightness of the patterns and a difference between white bands of the patterns.