The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2011
Filed:
Feb. 07, 2005
Levinus Pieter Bakker, Helmond, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Carolus Ida Maria Antonius Spee, Helmond, NL;
Johannes Christiaan Leonardus Franken, Knegsel, NL;
Arnoud Cornelis Wassink, Veldhoven, NL;
Paul Peter Anna Antonius Brom, Eindhoven, NL;
Levinus Pieter Bakker, Helmond, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Carolus Ida Maria Antonius Spee, Helmond, NL;
Johannes Christiaan Leonardus Franken, Knegsel, NL;
Arnoud Cornelis Wassink, Veldhoven, NL;
Paul Peter Anna Antonius Brom, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method for removal of deposition on a radiation collector of a lithographic apparatus includes providing a gas barrier to an end of a radiation collector, thereby providing a radiation collector enclosure volume; providing a gas to the enclosure volume, the gas selected from a halogen containing gas and a hydrogen containing gas; and removing at least part of the deposition from the radiation collector. A lithographic apparatus includes a radiation collector; a circumferential hull enclosing the radiation collector; a gas barrier at an end of the radiation collector, thereby providing a radiation collector enclosure volume. The radiation collector is enclosed by the circumferential hull and the gas barrier. An inlet provides a gas to the radiation collector enclosure volume and an outlet removes a gas from the radiation collector enclosure volume.