The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2011
Filed:
Aug. 20, 2008
Hans-artur Boesser, Breidenbach, DE;
Michael Heiden, Woelfersheim, DE;
Klaus Rinn, Heuchelheim, DE;
Frank Laske, Weilburg, DE;
Hans-Artur Boesser, Breidenbach, DE;
Michael Heiden, Woelfersheim, DE;
Klaus Rinn, Heuchelheim, DE;
Frank Laske, Weilburg, DE;
Vistec Semiconductor System GmbH, Weilburg, DE;
Abstract
A coordinate measuring machine () including a plane () in which there is arranged a movable measurement table () moving the mask () correspondingly in the plane (), at least one objective () and a detector (), an incident light source () arranged to provide incident light and/or a transmitted light source () arranged to provide transmitted light, wherein the mask () has at least a first area () and a second area (), wherein the first area () and the second area () comprise different materials differing in their transmission or reflection properties.