The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2010
Filed:
Apr. 11, 2008
Goro Takahashi, Oshu, JP;
Hisashi Inoue, Fuchu, JP;
Shoichi Kanda, Oshu, JP;
Wenling Wang, Nirasaki, JP;
Goro Takahashi, Oshu, JP;
Hisashi Inoue, Fuchu, JP;
Shoichi Kanda, Oshu, JP;
Wenling Wang, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rule table, and a performance unit that obtains temperature profiles and calculates differences between actually measured temperatures and target values. It refers to the rule table change the PID constants. The control part also updates relationships between PID constants and predicted temperature change amounts.