The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 21, 2010
Filed:
Nov. 15, 2007
Maarten Rutgers, Los Angeles, CA (US);
William H. Hertzog, Goleta, CA (US);
Keith M. Jones, Cary, NC (US);
Amir A. Moshar, Oxford, GB;
Maarten Rutgers, Los Angeles, CA (US);
William H. Hertzog, Goleta, CA (US);
Keith M. Jones, Cary, NC (US);
Amir A. Moshar, Oxford, GB;
Asylum Research Corporation, Santa Barbara, CA (US);
Abstract
An apparatus and technique for measuring the electrical capacitance between a conducting tip of a scanning probe microscope and a sample surface is described. A high frequency digital vector network analyzer is connected to the probe tip of the cantilever of an atomic force microscope, and data collection is coordinated by a digital computer using digital trigger signals between the AFM controller and the vector network analyzer. Methods for imaging tip-sample capacitance and spectroscopic measurements at a single point on the sample are described. A method for system calibration is described.