The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2010
Filed:
Jul. 24, 2007
Kazuhisa Matsumoto, Koshi, JP;
Satoshi Kaneko, Koshi, JP;
Masami Akimoto, Koshi, JP;
Takayuki Toshima, Koshi, JP;
Norihiro Ito, Koshi, JP;
Kazuhisa Matsumoto, Koshi, JP;
Satoshi Kaneko, Koshi, JP;
Masami Akimoto, Koshi, JP;
Takayuki Toshima, Koshi, JP;
Norihiro Ito, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A liquid processing system includes a liquid processing section including liquid processing units horizontally disposed therein and each configured to perform a liquid process while supplying a process liquid onto a substrate; a process liquid storing section that stores the process liquid to be supplied to the liquid processing units of the liquid processing section; and a piping unit including a supply pipe configured to guide the process liquid from the process liquid storing section to the liquid processing units. The process liquid storing section, the piping unit, and the liquid processing section are disposed inside a common casing in this order from below. The supply pipe of the piping unit has a horizontal pipe portion horizontally extending along an array direction of the liquid processing units, such that the process liquid is supplied from the horizontal pipe portion to the liquid processing units individually.