The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
Nov. 30, 2007
Matthew Lent, Livermore, CA (US);
Stanislaw Marek Borowicz, San Jose, CA (US);
Mehran Nasser-ghodsi, Hamilton, MA (US);
Niles Kenneth Macdonald, San Jose, CA (US);
YE Yang, Fremont, CA (US);
Kenneth J. Krzeczowski, Scotts Valley, CA (US);
Matthew Lent, Livermore, CA (US);
Stanislaw Marek Borowicz, San Jose, CA (US);
Mehran Nasser-Ghodsi, Hamilton, MA (US);
Niles Kenneth MacDonald, San Jose, CA (US);
Ye Yang, Fremont, CA (US);
Kenneth J. Krzeczowski, Scotts Valley, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
A method of imaging using an electron beam. An incident electron beam is focused onto the specimen surface, a scattered electron beam is extracted from the specimen surface, and a plurality of dark field signals are detected using a detection system. An interpolated dark field signal is generated using the plurality of dark field signals. In addition, a bright field signal may be detected using the detection system, and a final interpolated signal may be generated using the interpolated dark field signal and the bright field signal. User input may be received which determines a degree of interpolation between two adjacent dark field signals so as to generate the interpolated dark field signal and which determines an amount of interpolation between the interpolated dark field signal and the bright field signal so as to generate a final interpolated signal. Other embodiments, aspects and features are also disclosed.