The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
Mar. 27, 2009
Arthur J. Learn, Cupertino, CA (US);
Steven R. Sherman, Newton, MA (US);
Robert Michael Geffken, Burlington, VT (US);
John J. Hautala, Beverly, MA (US);
Arthur J. Learn, Cupertino, CA (US);
Steven R. Sherman, Newton, MA (US);
Robert Michael Geffken, Burlington, VT (US);
John J. Hautala, Beverly, MA (US);
TEL Epion Inc., Billerica, MA (US);
Abstract
Methods of forming capping structures on one or more different material surfaces are provided. One embodiment includes disposing a semiconductor structure in a reduced pressure chamber, forming a capping GCIB within the reduced pressure chamber, and directing the capping GCIB onto at least one of the one or more different material surfaces, so as to form at least one capping structure on the one or more surfaces onto which the capping GCIB is directed.