The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
Dec. 31, 2008
Applicants:
Tsuyoshi Moriya, Nirasaki, JP;
Takahiro Murakami, Miyagi-gun, JP;
Yoshiyuki Kobayashi, Nirasaki, JP;
Tetsuji Sato, Nirasaki, JP;
Inventors:
Tsuyoshi Moriya, Nirasaki, JP;
Takahiro Murakami, Miyagi-gun, JP;
Yoshiyuki Kobayashi, Nirasaki, JP;
Tetsuji Sato, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F01D 1/36 (2006.01);
U.S. Cl.
CPC ...
Abstract
An exhausting system and an exhausting pump connected to a processing chamber of a substrate processing apparatus are provided. The exhausting pump is provided with at least one rotary blade and a cylindrical intake part disposed at the processing chamber side from the rotary blade. The exhausting pump includes a reflecting device disposed inside the intake part and having at least one reflecting surface oriented to the rotary blade.