The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
Jul. 09, 2004
Hiroaki Saeki, Nirasaki, JP;
Shigeru Ishizawa, Nirasaki, JP;
Takehiro Shindo, Nirasaki, JP;
Tsutomu Hiroki, Nirasaki, JP;
Wataru Machiyama, Nirasaki, JP;
Hiroaki Saeki, Nirasaki, JP;
Shigeru Ishizawa, Nirasaki, JP;
Takehiro Shindo, Nirasaki, JP;
Tsutomu Hiroki, Nirasaki, JP;
Wataru Machiyama, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A transfer apparatus () for a target substrate (W) includes a rotatable rotary base (). First and second arm mechanisms () are attached to the rotary base and configured to bend and stretch. Each of the first and second arm mechanisms has a proximal end arm (A,A), an intermediate arm (B,B), and a pick (C,C) which are pivotally coupled to each other sequentially from the rotary base. The picks are disposed to support the target substrate. A link mechanism () is coupled to the proximal end arms of the first and second arm mechanisms to drive the first and second arm mechanisms. A first driving source () is disposed to rotatably drive the rotary base. A second driving source () is disposed to drive the link mechanism so as to bend or stretch the first and second arm mechanisms.