The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2010
Filed:
Apr. 29, 2005
Nora-jean Harned, Redding, CT (US);
Richard A. Gontin, Rye, NY (US);
Robert D. Harned, Redding, CT (US);
Azat M. Latypov, Danbury, CT (US);
Stanislav Y. Smirnov, Bethel, CT (US);
Nora-Jean Harned, Redding, CT (US);
Richard A. Gontin, Rye, NY (US);
Robert D. Harned, Redding, CT (US);
Azat M. Latypov, Danbury, CT (US);
Stanislav Y. Smirnov, Bethel, CT (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
An embodiment of the present invention provides a method for designing optical surfaces. According to this method, m optical surfaces are defined, such that each successive optical surface receives a wavefront from a previous optical surface. Wavefront aberrations caused by each optical surface are calculated. The changes at each respective optical surface required to compensate for the wavefront aberration caused by the respective optical surfaces are then calculated. A desired optical profile for each of the m optical surfaces is determined in accordance with the calculated changes to each respective optical surface.