The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2010
Filed:
Mar. 05, 2007
Atsushi Kobaru, Hitachinaka, JP;
Hidetoshi Morokuma, Hitachinaka, JP;
Hiroki Kawada, Tsuchiura, JP;
Sho Takami, Hitachinaka, JP;
Katsuhiro Sasada, Hitachinaka, JP;
Kouichi Yamamoto, Hitachinaka, JP;
Norio Satou, Ibaraki, JP;
Kunio Nakanishi, Kitaibaraki, JP;
Atsushi Kobaru, Hitachinaka, JP;
Hidetoshi Morokuma, Hitachinaka, JP;
Hiroki Kawada, Tsuchiura, JP;
Sho Takami, Hitachinaka, JP;
Katsuhiro Sasada, Hitachinaka, JP;
Kouichi Yamamoto, Hitachinaka, JP;
Norio Satou, Ibaraki, JP;
Kunio Nakanishi, Kitaibaraki, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.