The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2010
Filed:
Feb. 26, 2008
Applicants:
Thomas Feudel, Radebeul, DE;
Manfred Horstmann, Duerrroehrsdorf-Dittersbach, DE;
Andreas Gehring, Dresden, DE;
Inventors:
Thomas Feudel, Radebeul, DE;
Manfred Horstmann, Duerrroehrsdorf-Dittersbach, DE;
Andreas Gehring, Dresden, DE;
Assignee:
Advanced Micro Devices, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of forming a semiconductor structure includes providing a substrate having a first feature and a second feature. A mask is formed over the substrate. The mask covers the first feature. An ion implantation process is performed to introduce ions of a non-doping element into the second feature. The mask is adapted to absorb ions impinging on the first feature. After the ion implantation process, an annealing process is performed.