The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2010
Filed:
Dec. 22, 2003
Vadim Yevgenyevich Banine, Helmond, NL;
Levinus Pieter Bakker, Helmond, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Lucas Henricus Johannes Stevens, Eindhoven, NL;
Yurii Victorvitch Sidelnikov, Troitsk, RU;
Marcel Mathijs Theodore Marie Dierichs, Venlo, NL;
Marius Ravensbergen, Bergeijk, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Levinus Pieter Bakker, Helmond, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Lucas Henricus Johannes Stevens, Eindhoven, NL;
Yurii Victorvitch Sidelnikov, Troitsk, RU;
Marcel Mathijs Theodore Marie Dierichs, Venlo, NL;
Marius Ravensbergen, Bergeijk, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An assembly for detection of at least one of radiation flux and contamination on an optical component includes a detector configured to receive at least one of the radiation flux and contamination, and when the assembly is in use, to generate a detector signal correlated to at least one of the radiation flux and contamination on the component. A meter is configured to measure the detector signal. The detector includes at least one wire.