The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2010
Filed:
Oct. 26, 2007
Leszek Wojcik, Poughquag, NY (US);
Diwakar Kedlaya, Yonkers, NY (US);
Kanti Jain, Hawthorne, NY (US);
Sivarama Krishna Kuchibhotla, Thealls, NY (US);
Arun Paneerselvam, White Plains, NY (US);
Leszek Wojcik, Poughquag, NY (US);
Diwakar Kedlaya, Yonkers, NY (US);
Kanti Jain, Hawthorne, NY (US);
Sivarama Krishna Kuchibhotla, Thealls, NY (US);
Arun Paneerselvam, White Plains, NY (US);
Anvik Corporation, Hawthorne, NY (US);
Abstract
A turbulence-controlled vacuum debris removal subsystem safely exhausts particles ejected during photoablation. Nested interconnected chambers provide diminishing sweeping gas partial pressure and diminishing turbulence, ejecting particles from the ablation beam path between pulses, without compromising continuing particle conductance. Removal rate (debris generation rate) depends on conductance and particle sizes. The chambers interconnect through metering holes which enable optimization of partial pressure differentials. Controlled flow accomplishes debris removal, reducing turbulence of the mixture of debris and sweeping gases. A preferred embodiment uses a nest of concentric chambers, providing a clear light path. Another preferred embodiment uses orifices on chamber faces for removal and forming an envelope of gas around the processing region for dynamically containing the ejected particulate matter from the ablation site to the exhaust.