The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2010
Filed:
Apr. 01, 2009
Hiroshi Yamada, Nirasaki, JP;
Masaru Suzuki, Nirasaki, JP;
Tetsuji Watanabe, Nirasaki, JP;
Takeshi Kawaji, Nirasaki, JP;
Hiroshi Yamada, Nirasaki, JP;
Masaru Suzuki, Nirasaki, JP;
Tetsuji Watanabe, Nirasaki, JP;
Takeshi Kawaji, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An alignment method is used in implementation of electric characteristic inspection of an object to be inspected via electric contact between the object disposed on a movable mounting table and probes. The alignment method includes detecting tip positions of the probes by using the tip position detecting device, detecting the tip positions of the probes, previously detected by the tip position detecting device, by using the second imaging unit, transferring needle marks of the probes onto a soft member provided at the tip position detecting device by allowing the probes to come into contact with the soft member, detecting the needle marks of the probes formed on the soft member by using the first imaging unit, and detecting inspection electrodes of the object corresponding to the probes by using the first imaging unit.