The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2010
Filed:
Jul. 20, 2006
Hiroki Yoshikawa, Niigata, JP;
Hiroshi Kubota, Niigata, JP;
Yoshinori Kinase, Niigata, JP;
Satoshi Okazaki, Niigata, JP;
Tamotsu Maruyama, Niigata, JP;
Takashi Haraguchi, Tokyo, JP;
Masahide Iwakata, Tokyo, JP;
Yuichi Fukushima, Tokyo, JP;
Tadashi Saga, Tokyo, JP;
Hiroki Yoshikawa, Niigata, JP;
Hiroshi Kubota, Niigata, JP;
Yoshinori Kinase, Niigata, JP;
Satoshi Okazaki, Niigata, JP;
Tamotsu Maruyama, Niigata, JP;
Takashi Haraguchi, Tokyo, JP;
Masahide Iwakata, Tokyo, JP;
Yuichi Fukushima, Tokyo, JP;
Tadashi Saga, Tokyo, JP;
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Toppan Printing Co., Ltd., Tokyo, JP;
Abstract
A light-shielding film for exposure light is formed on one principal plane of a transparent substrate made of quartz or the like that serves as a photomask substrate. The light-shielding film can serve not only as the so-called 'light-shielding film' but also as an anti-reflection film. In addition, the light-shielding film has a total thickness of 100 nm or less, 70% or more of which is accounted for by the thickness of a chromium compound that has an optical density (OD) per unit thickness of 0.025 nmfor light having a wavelength of 450 nm. In the case where the photomask blank is used for fabricating a mask designed for ArF exposure, the thickness and composition of the light-shielding film are selected in such a manner that the OD of the light-shielding film is 1.2 to 2.3 for 193 or 248 nm wavelength light.