The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2010
Filed:
May. 01, 2008
Applicants:
Burn-jeng Lin, Hsin-Chu, TW;
Ching-yu Chang, Yilang County, TW;
Inventors:
Burn-Jeng Lin, Hsin-Chu, TW;
Ching-Yu Chang, Yilang County, TW;
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G21K 5/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method, tool, and machine for hardening a photoresist image while the photoresist image is immersed in a liquid.