The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2010
Filed:
Feb. 07, 2007
Applicants:
Kai Frohberg, Niederau, DE;
Thomas Werner, Reichenberg, DE;
Holger Schuehrer, Dresden, DE;
Inventors:
Assignee:
Globalfoundries Inc., Grand Cayman, KY;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G01R 31/26 (2006.01); H01L 31/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
By providing test features of increased thickness in a test structure for performing an x-ray diffraction measurement for evaluating the crystalline characteristics, such as the contents of germanium, an increased accuracy may be achieved, since the patterned SOI layer may be used as an efficient reference for the required data analysis.