The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2010
Filed:
Jun. 30, 2008
Sridhar Govindaraju, Hillsboro, OR (US);
Karson Knutson, Beaverton, OR (US);
Harold Kennel, Portland, OR (US);
Aravind Killampalli, Hillsboro, OR (US);
Jack Hwang, Portland, OR (US);
Sridhar Govindaraju, Hillsboro, OR (US);
Karson Knutson, Beaverton, OR (US);
Harold Kennel, Portland, OR (US);
Aravind Killampalli, Hillsboro, OR (US);
Jack Hwang, Portland, OR (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
Temperature measurement using a pyrometer in a processing chamber is described. The extraneous light received by the pyrometer is reduced. In one example, a photodetector is used to measure the intensity of light within the processing chamber at a defined wavelength. A temperature circuit is used to convert the measured light intensity to a temperature signal, and a doped optical window between a heat source and a workpiece inside processing chamber is used to absorb light at the defined wavelength directed at the workpiece from the heat source.