The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2010
Filed:
Oct. 03, 2007
Keiichiro Hitomi, Kokubunji, JP;
Yasunari Sohda, Kawasaki, JP;
Yoshinori Nakayama, Sayama, JP;
Hajime Koyanagi, Koshigaya, JP;
Keiichiro Hitomi, Kokubunji, JP;
Yasunari Sohda, Kawasaki, JP;
Yoshinori Nakayama, Sayama, JP;
Hajime Koyanagi, Koshigaya, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
In method and apparatus for obtaining a scanning electron microscope image devoid of distortion by measuring a scanning distortion and calibrating the scanning distortion, there occurs a problem that an error takes place in dimension control owing to a scanning distortion of an electron beam. To cope with this problem, an image is obtained by scanning a predetermined region with the electron beam, a plurality of regions are selected from the image, the pattern pitch is measured in each of the regions and a scanning distortion amount is calculated from the result of measurement and then corrected.