The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 08, 2010

Filed:

Aug. 06, 2007
Applicants:

Tohru Ando, Tokyo, JP;

Yasuhiko Nara, Hitachinaka, JP;

Tsutomu Saito, Hitachinaka, JP;

Shinichi Kato, Mito, JP;

Takeshi Sunaoshi, Hitachinaka, JP;

Inventors:

Tohru Ando, Tokyo, JP;

Yasuhiko Nara, Hitachinaka, JP;

Tsutomu Saito, Hitachinaka, JP;

Shinichi Kato, Mito, JP;

Takeshi Sunaoshi, Hitachinaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/00 (2006.01); G06K 9/00 (2006.01); G06K 9/62 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor testing method capable of quickly counting semiconductor cells in which a seemingly horizontal or vertical line is drawn with a mouse, and raster rotation is performed in alignment with the closer axis. After that, the stage is horizontally moved, pattern matching is performed on an image on a position where the image should be disposed, and an angle is adjusted. The stage is moved evenly along the X-axis and the Y-axis, achieving a movement to a destination like a straight line. In synchronization with the smooth movement of the stage, a cell is surrounded in a rectangular frame by a ruler, and the number of cells is displayed with a numeric value.


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