The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 08, 2010

Filed:

Dec. 08, 2006
Applicants:

Joe Bloomquist, Dresden, DE;

Peter Javorka, Dresden, DE;

Manfred Horstmann, Duerrroehrsdorf-Dittersbach, DE;

Gert Burbach, Dresden, DE;

Inventors:

Joe Bloomquist, Dresden, DE;

Peter Javorka, Dresden, DE;

Manfred Horstmann, Duerrroehrsdorf-Dittersbach, DE;

Gert Burbach, Dresden, DE;

Assignee:

Globalfoundries Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/80 (2006.01); H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract

By selectively performing a pre-amorphization implantation process in logic areas and memory areas, the negative effect of the interaction between stressed overlayers and dislocation defects may be avoided or at least significantly reduced in the memory areas, thereby increasing production yield and stability of the memory areas.


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