The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
Jul. 16, 2007
Daniel C. Wack, Los Altos, CA (US);
Andrei Veldman, Issaquah, WA (US);
Edward R. Ratner, Los Altos, CA (US);
John Hench, Los Gatos, CA (US);
Noah Bareket, Saratoga, CA (US);
Daniel C. Wack, Los Altos, CA (US);
Andrei Veldman, Issaquah, WA (US);
Edward R. Ratner, Los Altos, CA (US);
John Hench, Los Gatos, CA (US);
Noah Bareket, Saratoga, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
The present application discloses a new technique which reduces the dimensionality of a feature model by re-use of data that has been obtained by a prior measurement. The data re-used from the prior measurement may range from parameters, such as geometrical dimensions, to more complex data that describe the electromagnetic scattering function of an underlying layer (for example, a local solution of the electric field properties).