The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2010
Filed:
Oct. 26, 2005
Norihisa Koga, Kikuchi-gun, JP;
Shinji Koga, Kikuchi-gun, JP;
Naoto Yoshitaka, Kikuchi-gun, JP;
Akira Nishiya, Kikuchi-gun, JP;
Norihisa Koga, Kikuchi-gun, JP;
Shinji Koga, Kikuchi-gun, JP;
Naoto Yoshitaka, Kikuchi-gun, JP;
Akira Nishiya, Kikuchi-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Before applying a processing laser beam to a surface of a substrate through a film of liquid, distance Mbetween a reference point on an axis of a first laser displacement meter and the surface of the substrate is measured to correct distance Mbetween a lower end of an optical unit and the surface of the substrate, on the basis of distance M, the processing laser beam is applied to the surface of the substrate, thereby cutting and removing a part of the surface of the substrate, and a depth to which the surface of the substrate has been cut and removed with the processing laser beam is measured by a second laser displacement meter.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile