The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2010
Filed:
Jun. 26, 2007
Applicants:
Nadia Rahhal-orabi, Hillsboro, OR (US);
Charles H. Wallace, Portland, OR (US);
Alison Davis, Hillsboro, OR (US);
Swaminathan Sivakumar, Portland, OR (US);
Inventors:
Nadia Rahhal-Orabi, Hillsboro, OR (US);
Charles H. Wallace, Portland, OR (US);
Alison Davis, Hillsboro, OR (US);
Swaminathan Sivakumar, Portland, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/51 (2006.01); H01L 21/469 (2006.01);
U.S. Cl.
CPC ...
Abstract
In one embodiment of the invention, contact patterning may be divided into two or more passes which may allow designers to control the gate height critical dimension relatively independent from the contact top critical dimension.