The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2010
Filed:
Dec. 29, 2003
Todd C. Bailey, Fishkill, NY (US);
Byung-jin Choi, Round Rock, TX (US);
Matthew E. Colburn, Hopewell Junction, NY (US);
Sidlgata V. Sreenivasan, Austin, TX (US);
Carlton G. Willson, Austin, TX (US);
John G. Ekerdt, Austin, TX (US);
Todd C. Bailey, Fishkill, NY (US);
Byung-Jin Choi, Round Rock, TX (US);
Matthew E. Colburn, Hopewell Junction, NY (US);
Sidlgata V. Sreenivasan, Austin, TX (US);
Carlton G. Willson, Austin, TX (US);
John G. Ekerdt, Austin, TX (US);
Board of Regents, The University of Texas System, Austin, TX (US);
Abstract
Described are imprint lithography templates, methods of forming and using the templates, and a template holder device. An imprint lithography template may include a body with a plurality of recesses on a surface of the body. The body may be of a material that is substantially transparent to activating light. At least a portion of the plurality of recesses may define features having a feature size less than about 250 nm. A template may be formed by obtaining a material that is substantially transparent to activating light and forming a plurality or recesses on a surface of the template. In some embodiments, a template may further include at least one alignment mark. In some embodiments, a template may further include a gap sensing area. An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and at least one piezo actuator coupled to the body. The piezo actuator may be configured to alter a physical dimension of the template during use.